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No. Item No. Metdod Diameter Conductivity Dopant Orientation Resistivity Thickness Surface Quantity TTV(μm) Bow(μm) Warp(μm) Flat
1 P8205-11 CZ 2 P Boron <1-0-0> 1-10 1000±25 SSP 43 <5 <30 <30 1
2 P8204-11 CZ 2" P Boron <1-0-0> 1-10 279±15 SSP 16 <5 <30 <30 1
3 P8208-13 CZ 2" P Boron <1-0-0> 0.01-0.02 280±10 SSP 100 <10 <30 <30 1
4 P8218-13 CZ 2" P Boron <1-0-0> 1-10 500±10 SSP 100 <10 <30 <30 1
5 P8213-11 CZ 2" P Boron <1-0-0> 1-10 2000±25 SSP 9 <10 <30 <30 1
6 P8217-63 CZ 2" P Boron <1-0-0> 1-10 200±15 DSP 400 <5 <30 <30 1
7 P8290
8 P8291
9 P8292
10 P8293
11 P8314-9 CZ 3" P Boron <111> off 2.5° 0.001-0.005 380±15 SSP 21 <10 <30 <30 1
12 P8320-11 CZ 3" N Phosphorus <1-0-0> 20-50 430±25 SSP 11 <10 <30 <30 2
13 P8315-14 CZ 3" P Boron <1-0-0> 1-10 380±15 DSP 15 <10 <30 <30 2
14 P8321-14 CZ 3" N Phosphorus <1-0-0> 20-50 450±20 DSP 100 <10 <40 <40 2
15 P8322-11 CZ 3" P Boron <1-0-0> 10-20 380±15 SSP 15 <5 <30 <30 2
16 P8318-4044 CZ 3" N Phosphorus <1-0-0> 1-10 381±15 SSP 440 <10 <30 <30 2
17 P8319-42 CZ 3" N Arsenic <1-0-0> 0.001-0.005 380±15 SSP 191 <10 <30 <30 2
18 P83101
19 P83102
20 P83103
21 P8422-7 CZ 4 P Boron <1-0-0> 1-10 800±20 DSP 145 <10 <30 <30 2

No. Item No. Metdod Diameter Conductivity Dopant Orientation Resistivity Thickness Surface Quantity TTV(μm) Bow(μm) Warp(μm) Flat
1 22 22 22 22
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